Surface Quality Monitors
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The SQM Series instruments
are based on the principle known as Optically Stimulated Electron Emission
(OSEE), also known as Photo Electron Emission (PEE). It is a well known
fact that when metals or certain other surfaces are illuminated with ultraviolet
light of the proper wavelength (energy), electrons are emitted from the
surface. The process by which UV photons interact with the surface to
produce electrons is known as OSEE. The emitted and subsequently scattered
electrons can be collected across an air gap by a biased collector (located
at the end of the the OSEE sensor), and measured as a current. By maintaining
the surface to collector distance relatively constant, changes in the
measured photocurrent (which is in the order of 10-10 amps)
can provide information about the surface, e.g., electronic structure,
composition, and chemistry. Any contaminant on the surface, depending
on its own photoemission characteristics, can either enhance or attenuate
the inherent emission from the surface. In simple electronic terms, the
surface is a current generator, and a non-photoemitting contaminant acts
as a resistance, because the current is attenuated by interactions between
the electrons and the contaminant. The thicker the contaminant, the higher
the resistance, and consequently the greater the decrease in the measured
signal. |
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